Title:
LASER SYSTEM, NONLINEAR OPTICAL CRYSTAL AND PASSIVATION METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2018132773
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a system for optically inspecting one or more samples.SOLUTION: A laser system 400 comprises: an NLO crystal 104 that is annealed within a selected temperature range and passivated to a selected passivation level by at least one of hydrogen, deuterium, hydrogen-containing mixtures, and deuterium-containing mixtures; at least one light source 402 configured to generate light at a selected wavelength and to transmit light through the NLO crystal 104; and a housing unit 406 configured to house the NLO crystal 104.SELECTED DRAWING: Figure 4
Inventors:
CHUANG YUNG-HO
VLADIMIR DRIBINSKI
VLADIMIR DRIBINSKI
Application Number:
JP2018074155A
Publication Date:
August 23, 2018
Filing Date:
April 06, 2018
Export Citation:
Assignee:
KLA ENCOR CORP
International Classes:
G02F1/35; C30B29/22; C30B33/02; G02F1/37; H01S3/10
Domestic Patent References:
| JP2011158869A | 2011-08-18 | |||
| JPH09328395A | 1997-12-22 | |||
| JPH0511287A | 1993-01-19 | |||
| JP6000362B2 | 2016-09-28 | |||
| JP2011507305A | 2011-03-03 |
Foreign References:
| US20030011872A1 | 2003-01-16 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office