Title:
レーザー式検査装置
Document Type and Number:
Japanese Patent JP6526978
Kind Code:
B2
Inventors:
Taichi Ijuin
Application Number:
JP2015019987A
Publication Date:
June 05, 2019
Filing Date:
February 04, 2015
Export Citation:
Assignee:
Daiwa Seikan Co., Ltd.
International Classes:
G01B11/24; G01L11/00
Domestic Patent References:
JP63298112A | ||||
JP5223569A | ||||
JP2001318163A | ||||
JP2013096709A |
Foreign References:
WO2011048781A1 |
Attorney, Agent or Firm:
Watanabe strong