PURPOSE: To improve the efficiency and speed of working and to perform surely working in a short time by working a work by the laser light and glow or corona discharge generated in a gaseous halogen atmosphere.

CONSTITUTION: The inside of an evacuating chamber 1 is maintained under about 1W10Torr or below by a mechanical booster 16 and a rotary vacuum pump 17, etc. Glow discharge is generated therein when a voltage is impressed between an electrode 20 and a body 21 to be worked from a power source device 28. The voltage is therein decreased to maintain the glow discharge in the prescribed generating state and the body 21 is heated. Gaseous halogen or halogen compd. such as freon is supplied to the chamber from a gaseous halogen supplying device 18. Laser light from a laser light irradiator 5 is thereafter focused by a focusing lens 7 and is irradiated to the working part of the body 21. The body 21 is worked in a short time by the above-mentioned plural actions.