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Title:
LATERAL AND LONGITUDINAL MOVEMENT AND ROTATION SUPPORTING MECHANISM OF STAGE
Document Type and Number:
Japanese Patent JP2940663
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To obtain a lateral and longitudinal movement and rotation supporting mechanism of a light weight and a low cost, by forming a supporting unit making the inner side support plate side and the outer side support plate side as the installing part, and installing plural supporting units between a support board and a stage.
SOLUTION: While the installing part 10 of the inner side support plate 5 is installed to the frame of a support board 1, the outer side support plate 6a at the upper side is installed to the frame of a stage 2, so as to support the stage 2 on the support board 1. Although the stage 2 is limited by the moving strokes of the supporting units 3, the stage 2 is supported to the support board 1 allowable to move freely, that is, to move laterally and longitudinally, and to rotate, to the support board 1, by balls 8 held to holding members 7. At least the stage 2 is formed in a frame shape, a window 4a is formed at the center, and the window 4a is made in a through space not disturbed by the supporting units 3 and the like.


Inventors:
HIROSE KAZUYA
Application Number:
JP31392095A
Publication Date:
August 25, 1999
Filing Date:
December 01, 1995
Export Citation:
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Assignee:
HIROSE KAZUYA
International Classes:
G12B5/00; B23Q1/00; B23Q1/26; B23Q1/40; B23Q1/44; B23Q5/34; (IPC1-7): B23Q1/40; B23Q5/34; G12B5/00
Domestic Patent References:
JP1240246A
JP29550A
JP62282294A
JP7181276A
JP3117537U
JP4128130U
JP512678B2
Attorney, Agent or Firm:
Koji Mikami