Title:
LATERAL TYPE HEAT-TREATING EQUIPMENT AND HEAT TREATING METHOD
Document Type and Number:
Japanese Patent JPH0582460
Kind Code:
A
Abstract:
PURPOSE: To obtain a lateral type heat-treating equipment and a heat-treating method wherein air does not flow into a quartz tube, and the formation of a natural oxide film can be prevented.
CONSTITUTION: An object 7 to be treated is accommodated in an inner cylinder part 81 of a quartz tube 8, and heat-treated while gas having desired quality is supplied via a pipe 51. The velocity of inert gas which is supplied to the inside of an outer cylinder part 82 and flows out from the aperture end surface is set to be larger than the velocity of gas which flows out from the aperture end surface of the inner cylinder part 81, when aperture end surfaces of the inner cylinder part 81 and the outer cylinder part 82 are opened.
More Like This:
Inventors:
ISHIKAWA KAZUHIRO
Application Number:
JP23902591A
Publication Date:
April 02, 1993
Filing Date:
September 19, 1991
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
F27B5/04; H01L21/22; H01L21/324; (IPC1-7): F27B5/04; H01L21/22; H01L21/324
Attorney, Agent or Firm:
Teiichi
Next Patent: VERTICAL TYPE HEAT TREATING FURNACE