Title:
LAYERED STRUCTURE MANUFACTURING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2023097915
Kind Code:
A
Abstract:
To manufacture a layered structure equipped with a layer including a carbon nano-tube with good productivity.SOLUTION: A layered structure manufacturing comprises first to fifth steps. In the first step, a first coating liquid having a dispersoid containing a carbon nano-tube and a liquid as a dispersant in which the dispersoid is dispersed is applied to a principal surface of a base plate. In the second step, the first coating liquid applied to the principal surface is dried. In the third step, the liquid is removed being modified, and a first layer containing the dispersoid is formed. In the fourth step, a second coating liquid containing a precursor of a high polymeric material is applied to the first layer from a side opposite to the principal surface. In the fifth step, the precursor is polymerized, and a second layer containing the high polymeric material is formed.SELECTED DRAWING: Figure 1
Inventors:
KAKIMURA TAKASHI
SHIRATORI JIRO
SHIRATORI JIRO
Application Number:
JP2021214293A
Publication Date:
July 10, 2023
Filing Date:
December 28, 2021
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
TOMOEGAWA PAPER CO LTD
TOMOEGAWA PAPER CO LTD
International Classes:
B05D1/36; B05D3/06; H01L21/336; H01L21/683; H05K3/18
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita