LEAK DETECTION METHOD

Japanese Patent JP2016024011

A

PROBLEM TO BE SOLVED: To accurately perform a leak test of a test piece by using a leak detector and helium gas mixture without adding special facility or equipment.SOLUTION: A leak detector is provided with: a vacuum pump 6 which is connected with a test piece via a connection pipe; a mass analysis pipe 2 which detects helium; and a Pirani vacuum gauge 9 which measures pressure in connection pipes 7a, 7b. An output value of the Pirani vacuum gauge 9 when helium concentration in helium gas mixture is varied under predetermined pressure is acquired. Conductance of the connection pipe while without connecting the connection pipe with the test piece, is adjusted so that indicated pressure of the Pirani vacuum gauge becomes the predetermined pressure. A vacuum pump is operated to measure a helium concentration from an output value of the Pirani vacuum gauge. The helium gas mixture from inside of the test piece is introduced into the mass analysis pipe, then a measured value at that time is considered as Qd (Pa m/sec), preliminarily measured helium concentration is considered as ct (%), and a value which is calculated by Qd/(Ct/100) is considered as a leak value.SELECTED DRAWING: Figure 1

NAKAJIMA TOYOAKI
SETO NORIMASA
HIRAYAMA MICHITO

JP2014147600A

February 08, 2016

July 18, 2014

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ULVAC CORP

G01M3/20

JPH08145835A	1996-06-07
JP2011209082A	2011-10-20
JP2005140504A	2005-06-02
JP2004340726A	2004-12-02
JPH05118949A	1993-05-14
JP2003047837A	2003-02-18
JPH08145835A	1996-06-07
JP2011209082A	2011-10-20
JP2005140504A	2005-06-02
JP2004340726A	2004-12-02
JPH05118949A	1993-05-14
JP2003047837A	2003-02-18

Seiryu Corporation

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