Title:
LEAK VALVE
Document Type and Number:
Japanese Patent JPH1182787
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To prevent generation of a galling on a contact face in a leak valve. SOLUTION: A fitting plate 1 is fixed on the outside face of a vacuum device inside wall 5 formed with a leak hole 22, and a pressing plate 7 serving as a contact seal member is pushed to the fitting plate 1 by means of a pressing rod 8 to dispose with centering in a needle valve structure leak valve and to prevent generation of a galling on the contact face.
Inventors:
HAYASHI CHIKAYUKI
Application Number:
JP25771497A
Publication Date:
March 26, 1999
Filing Date:
September 05, 1997
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
F16K24/00; F16K24/02; (IPC1-7): F16K24/00; F16K24/02
Attorney, Agent or Firm:
Yoshihiko Iinuma (2 outside)
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