Title:
蓄積法による漏れ検出装置および方法
Document Type and Number:
Japanese Patent JP4511543
Kind Code:
B2
Abstract:
Methods and apparatus are provided for leak detection by the accumulation method. The apparatus includes a sealable chamber ( 10 ) configured to receive a test piece ( 12 ) that, while in the chamber, contains a trace gas, a trace gas permeable member ( 30 ) in gas communication with the chamber, and a trace gas sensor ( 20 ) in gas communication with the permeable member and configured to sense the trace gas that passed from the chamber through the permeable member. The permeable member may be quartz. The trace gas sensor may include an ion pump.
Inventors:
Charles Perkins
Parentstin, Peter, N.
Parentstin, Peter, N.
Application Number:
JP2006533656A
Publication Date:
July 28, 2010
Filing Date:
June 09, 2004
Export Citation:
Assignee:
Varian, Incorporated
International Classes:
G01M3/20; G01M3/16; G01M3/32
Domestic Patent References:
| JP9501237A | ||||
| JP2054163A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki