PURPOSE: To enhance safety by detecting the leakage components in sealed cans with a leakage detector and outputting the detection output thereof to the outside a sealed box.
CONSTITUTION: The helium gas leaked through a sealed can 11 is led to a sealed box 2 through air suction piping 16 and a filter 41 and this helium gas is quantitatively meassured by a leakage detector 22. The detection signal having been obtained in this way is outputted to the outside of the sealed box through an airtight connector 23 and is sent to a control panel 3, where it is indicated by a meter or the like. The exhaust gas of suction-exhaust mechanism 21 and leakage detector 22 is returned to the inside of an isolation chamber 1 through exhaust piping 17 and is released therefrom.
NAGAYAMA NORISUKE
KOGATA YOSHIAKI
DORYOKURO KAKUNENRYO
| JPS514489A | 1976-01-14 |
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