Title:
LENS ABERRATION MEASURING METHOD
Document Type and Number:
Japanese Patent JP3268873
Kind Code:
B2
Abstract:
PURPOSE: To accurately measure a spherical aberration, a coma aberration of a lens to be inspected.
CONSTITUTION: A point spread image of a luminous point by an optical system 2 to be detected is formed as four secondary point spread images via a pupil quarternary imaging lens 5 having an imaging lens 3 and a pupil quarternary prism 4. Then, a spherical aberration or/and coma aberration of a lens to be detected are calculated by a calculation by using four coordinates of a position of center of gravity or central position of the point spread images corresponding to a plurality of image side numerical apertures of the system 2.
Inventors:
Kinpo Ohkawa
Application Number:
JP6095093A
Publication Date:
March 25, 2002
Filing Date:
February 25, 1993
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01M11/02; (IPC1-7): G01M11/02
Domestic Patent References:
| JP1196530A | ||||
| JP1197624A |
Attorney, Agent or Firm:
Takeshi Nara
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