PURPOSE: To provide an attitude control which is more appropriate and able to reduce a required time of control against a target consisting of the whole surface, in a levelling device for three-dimentionally controlling an inclining state (attitude state) of a loaded member in relation to a substrate to such an extent that a surface configuration must be taken into account.
CONSTITUTION: An uniform scanning to the surface on an attitude controlled side is performed to find coordinates of a plurality of points. An average surface which is a flat surface is obtained based on the coordinates, and the average surface is subjected to attitude control. The attitude control (inclination correction) is applied to an average surface obtaiend based on the whole surface considered as the object of the attitude control, so as to apply an appropriate attitude control to the whole surface. The above described attitude control requires shorter time is comparison with case of partially detecting an attitude controlled surface and repeating an attitude control continuously.
KONNO YOSHISHIGE
TOIDA YOICHI
| JPS60221245A | 1985-11-05 | |||
| JPS62152632A | 1987-07-07 | |||
| JPS4993971A | 1974-09-06 |
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