Title:
LEVITATION TRANSPORTATION DEVICE
Document Type and Number:
Japanese Patent JP2015218063
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a levitation transportation device that can keep a levitation height of a substrate constant above a horizontal plane.SOLUTION: The levitation transportation device levitating a substrate to transport the substrate includes a levitation stage for levitating the substrate with gas ejection and suction. In the levitation stage, a suction port for sucking the gas and an ejection port for ejecting the gas are formed. The ejection port is formed annularly around the suction port.
Inventors:
KONDO SHIRO
Application Number:
JP2014105486A
Publication Date:
December 07, 2015
Filing Date:
May 21, 2014
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
B65G49/06; B65G51/03
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida
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