Title:
Lid closing mechanism and a multi chamber processing system
Document Type and Number:
Japanese Patent JP5941943
Kind Code:
B2
Inventors:
Akihisa Tsukada
Keizo Shimura
Atsushi Inoue
Keizo Shimura
Atsushi Inoue
Application Number:
JP2014096837A
Publication Date:
June 29, 2016
Filing Date:
May 08, 2014
Export Citation:
Assignee:
YAC Co., Ltd.
International Classes:
H01L21/3065; C23C16/44; H01L21/677
Domestic Patent References:
| JP2012074480A | ||||
| JP2011098251A | ||||
| JP2007067218A | ||||
| JP2006122825A | ||||
| JP2001185534A | ||||
| JP11354457A |
Foreign References:
| US6585828 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Yasuhiko Murayama
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