Title:
摩擦を減らすための、ローラグライドを備えたリフトピン
Document Type and Number:
Japanese Patent JP4777345
Kind Code:
B2
Abstract:
A pin assembly for lifting and supporting substrates according to the invention comprises a roller glide for a lift pin with rollers reducing the friction of the vertical pin movement, a ball bearing sole plate with elastic suspension for re-centering the sole plate after one coating cycle and a ball-bearing pin head that lowers the friction between the pin and the substrate and minimizes lateral forces that the substrate can apply on the pin.
Inventors:
Dubost, Laurent
Hernandez, Sylvan
Jager, hans
Laundry, Carine
Binnel, Bertrand
The Podoni, Eugène
Schmidt, jack
El Bousiki, Le Duanne
Hernandez, Sylvan
Jager, hans
Laundry, Carine
Binnel, Bertrand
The Podoni, Eugène
Schmidt, jack
El Bousiki, Le Duanne
Application Number:
JP2007513650A
Publication Date:
September 21, 2011
Filing Date:
May 26, 2005
Export Citation:
Assignee:
OERLIKON SOLAR AG, TRUEBBACH
International Classes:
H01L21/683; C23C16/458; H01L21/687
Domestic Patent References:
| JP11204430A | ||||
| JP2001093960A | ||||
| JP2003197719A | ||||
| JP2000323556A | ||||
| JP2004165643A | ||||
| JP2004026365A | ||||
| JP11351250A | ||||
| JP2005240173A | ||||
| JP8313855A | ||||
| JP10102259A | ||||
| JP2000294620A | ||||
| JP9171984A | ||||
| JP2003124297A | ||||
| JP10247682A | ||||
| JP10308348A |
Foreign References:
| US3887247 |
Attorney, Agent or Firm:
Fukami patent office