Title:
LIGHT COLLECTION MIRROR TYPE HEATING FURNACE
Document Type and Number:
Japanese Patent JP2016109318
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To solve the problem that in a conventional light collection mirror type heating furnace, it is difficult to attain both of cooling efficiency and downsizing of a device.SOLUTION: In a light collection mirror type heating furnace, light radiated from a light source is reflected by a reflection mirror to irradiate a heated object, and thereby the heated object is heated. The light source, and the reflection mirror and the heated object are sectioned by a wall having a window member having infrared permeability to be positioned to independently individual chambers. Light radiated to a heated object surface penetrates the window member having infrared permeability to irradiate the heated object.SELECTED DRAWING: Figure 1
Inventors:
IKEDA SHINICHI
MIKAHARA TAKANORI
MIURA NORIKO
KUMPUAN SOMAWANG
HARA SHIRO
ONISHI YASUHIRO
YAMADA TAKESHI
AIZAWA TAKESHI
NOGAWA MITSUNORI
MIKAHARA TAKANORI
MIURA NORIKO
KUMPUAN SOMAWANG
HARA SHIRO
ONISHI YASUHIRO
YAMADA TAKESHI
AIZAWA TAKESHI
NOGAWA MITSUNORI
Application Number:
JP2014244539A
Publication Date:
June 20, 2016
Filing Date:
December 02, 2014
Export Citation:
Assignee:
NAT INST ADVANCED IND SCIENCE & TECH
YONEKURA SEISAKUSHO:KK
YONEKURA SEISAKUSHO:KK
International Classes:
F27B17/00; C03B19/00; C03C17/22; C23C14/50; C23C16/48; C30B25/10; F27D11/02; H01L21/205; H01L21/26; H01L21/31
Domestic Patent References:
JPH1082589A | 1998-03-31 | |||
JPH0972669A | 1997-03-18 | |||
JP2004303672A | 2004-10-28 | |||
JPS5542284A | 1980-03-25 | |||
JPH06215616A | 1994-08-05 | |||
JPS62127472A | 1987-06-09 | |||
JP2000138006A | 2000-05-16 | |||
JP2002305153A | 2002-10-18 | |||
JP2004296558A | 2004-10-21 | |||
JPH02282689A | 1990-11-20 |
Foreign References:
WO2013081107A1 | 2013-06-06 |
Attorney, Agent or Firm:
Zentaro Hasebe
Yasuyuki Yamada
Yasuyuki Yamada
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