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Title:
LIGHT SOURCE DEVICE, EXPOSURE DEVICE, AND LIGHT SOURCE CONTROL METHOD
Document Type and Number:
Japanese Patent JP2016224321
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide: a light source device capable of outputting, at a desired light quantity ratio, light having a plurality of different wavelengths; an exposure device provided with the light source device; and a light source control method.SOLUTION: A light source device comprises a control unit 10, which generates output control signals for separately controlling an output of a first light emitting element and an output of a second light emitting element, and which outputs thus generated output control signals to the first light emitting element and the second light emitting element, respectively, on the basis of: a predetermined light quantity ratio between light having first wavelength characteristics and light having second wavelength characteristics; and light quantity measurement values outputted from a sensor that measures the quantity of the light having the first wavelength characteristics and the quantity of the light having the second wavelength characteristics, both lights being included in output light accumulated by means of a light accumulating unit.SELECTED DRAWING: Figure 2

Inventors:
HIKI TATSUYA
KIMURA FUMIO
Application Number:
JP2015111865A
Publication Date:
December 28, 2016
Filing Date:
June 02, 2015
Export Citation:
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Assignee:
ADTEC ENGINEENG CO LTD
International Classes:
G03F7/20
Domestic Patent References:
JP2012063390A2012-03-29
JP2006017689A2006-01-19
JP2003215809A2003-07-30
JP2009237490A2009-10-15
JP2014049611A2014-03-17
JP2006201586A2006-08-03
JP2004146793A2004-05-20
Attorney, Agent or Firm:
Megumi Konishi
Shigeyuki Nagaoka



 
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