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Title:
LIGHT SOURCE DEVICE AND EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP2016184126
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To obtain a light source device including a plurality of LED elements and capable of enhancing uniformity of illuminance distribution on an irradiation surface.SOLUTION: The light source device comprises: a first optical system including a plurality of LED elements and a plurality of collimating lenses for respectively collimating light emitted from the plurality of LED elements; a second optical system for condensing the light exiting from the first optical system; and a light guide member with the incidence surface of which is disposed at a focal position of the second optical system. The light guide member is an optical member that guides light entering the incidence surface by reflecting on inner surfaces thereof to an exit surface.SELECTED DRAWING: Figure 2

Inventors:
MATSUSHIMA TAKEO
Application Number:
JP2015065345A
Publication Date:
October 20, 2016
Filing Date:
March 26, 2015
Export Citation:
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Assignee:
USHIO ELECTRIC INC
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
JP2014207300A2014-10-30
JPWO2004077533A12006-06-08
JP2006095911A2006-04-13
JP2010199435A2010-09-09
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office