Title:
Light equipment, an exposure device
Document Type and Number:
Japanese Patent JP6128348
Kind Code:
B2
Inventors:
Takeo Matsushima
Application Number:
JP2015065347A
Publication Date:
May 17, 2017
Filing Date:
March 26, 2015
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2010199435A | ||||
| JP2010272858A | ||||
| JP2013239268A | ||||
| JP2014207300A | ||||
| JP3157161U |
Foreign References:
| WO2012096203A1 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office