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Title:
LIGHT FLUX CONVERSION ELEMENT, ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2014003306
Kind Code:
A
Abstract:

To provide an illumination optical device which can form an annular pupil distribution in circumferential polarization state, while suppressing light quantity loss well.

The illumination optical device includes a light flux conversion element 50 for forming an annular light intensity distribution on a predetermined surface on the basis of an incident light flux. The light flux conversion element consists of a first basic element 50A formed of an optical material having optical rotation, and forming a first arcuate region distribution out of annular light intensity distributions on the basis of the incident light flux, a second basic element 50B for forming a second arcuate region distribution, a third basic element 50C for forming a third arcuate region distribution, and a fourth basic element 50D for forming a fourth arcuate region distribution. Each basic element has a different thickness in the transmission direction of light.


Inventors:
TOYODA MITSUNORI
Application Number:
JP2013157044A
Publication Date:
January 09, 2014
Filing Date:
July 29, 2013
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G02B27/00; G02B27/28; G02B27/44; G03F7/20
Domestic Patent References:
JP2011233911A2011-11-17
JP2014003305A2014-01-09
JP4976015B22012-07-18
JP4976094B22012-07-18
JPH0757992A1995-03-03
JPH06120110A1994-04-28
JPH0757992A1995-03-03
JPH06120110A1994-04-28
JP2010226117A2010-10-07
JP4976015B22012-07-18
JP4976094B22012-07-18
JP2011233911A2011-11-17
JP2014003305A2014-01-09
JP5696746B22015-04-08
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani



 
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