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Title:
LIGHT FLUX CONVERSION ELEMENT, LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2010226117
Kind Code:
A
Abstract:

To provide a lighting optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state while restraining light quantity loss well.

This lighting optical device includes a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a predetermined surface based on an incident light flux. The light flux conversion element is constituted of: a first basic element (50A) formed of an optically-rotating optical material, for forming a first arcuate region distribution based on an incident light flux out of the bracelet-form light intensity distribution; a second basic element (50B) for forming a second arcuate region distribution; a third basic element (50C) for forming a third arcuate region distribution; and a fourth basic element (50D) for forming a fourth arcuate region distribution. The respective basic elements have mutually different thicknesses along the light transmitting direction.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
TOYODA MITSUNORI
Application Number:
JP2010094216A
Publication Date:
October 07, 2010
Filing Date:
April 15, 2010
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B3/02; G02B3/08; G02B5/18; G02B5/30; G02B19/00; G02B27/00; G02B27/28; G02B27/44; G03F7/20
Domestic Patent References:
JPH0757993A1995-03-03
JPH07161622A1995-06-23
JPH07230945A1995-08-29
JPH0757992A1995-03-03
JP2003090978A2003-03-28
JP2002162655A2002-06-07
JPH07183201A1995-07-21
Foreign References:
WO2000067303A12000-11-09
WO2001035451A12001-05-17
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki