Title:
LIGHT INTENSITY DISTRIBUTION SIMULATING METHOD
Document Type and Number:
Japanese Patent JP2715895
Kind Code:
B2
Abstract:
PURPOSE: To provide a method for simulating a light intensity distribution in which a simulating accuracy can be improved corresponding to a deformed illumination.
CONSTITUTION: An integrator 1 is an optical element formed by assembling a plurality of sole lenses 2 of the same shape corresponding to an effective range 3, and main point light sources 4a are disposed at centers of the lenses 2 of the integrator 1. It is assumed that the intensities of the positions on the integrator 1 are Gaussian distributions of the light intensity distributions by effective light sources of the entire integrator 1, an approximate formula is obtained, values proportional to the values of the positions of the formula are set, and the integrator is modeled.
Inventors:
Nao Asato
Application Number:
JP901194A
Publication Date:
February 18, 1998
Filing Date:
January 31, 1994
Export Citation:
Assignee:
NEC
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)