Title:
光照射装置及び光照射方法
Document Type and Number:
Japanese Patent JP6601128
Kind Code:
B2
Abstract:
To provide a light irradiation device and a light irradiation method, which monitor whether a target is irradiated with light having an appropriate energy or not, at an optimum timing, and appropriately control a light source according to the result of monitoring. A workbench (2) holding a target (W) on an upper side moves toward an X direction by a transportation mechanism (3) and a work (W) receives light irradiation when passing through an irradiation range. A measurement value of an illuminometer attached to a side surface (21) of the workbench (2) is sent to a controller (7), and lighting control means (73) provided to the controller (7) calculates an amount of light by integrating measurement values and transmits a control command signal to a lighting power source (110) of a light source (11) such that a difference when compared with a light reference value set as an amount of light becomes zero.
Inventors:
Junji Kimura
Application Number:
JP2015200574A
Publication Date:
November 06, 2019
Filing Date:
October 08, 2015
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G03F7/20; G02F1/1337; H05B37/02
Domestic Patent References:
| JP2012155239A | ||||
| JP9260267A | ||||
| JP7283120A | ||||
| JP2004512669A | ||||
| JP2011071351A | ||||
| JP2014013277A | ||||
| JP8255741A | ||||
| JP2006202628A | ||||
| JP2006323060A | ||||
| JP2002350858A | ||||
| JP2014174287A | ||||
| JP2008116676A |
Foreign References:
| US20150227056 |
Attorney, Agent or Firm:
Koichi Hotate