Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2012084298
Kind Code:
A
Abstract:

To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.

The light irradiation device includes a light emission part equipped with a light source element row having a plurality of light source elements arranged in one direction, each consisting of a short-arc type discharge lamp and a reflector arranged to surround the discharge lamp for reflecting light from the discharge lamp to a parallel direction to its light axis, and a mask made by arranging a number of linear shielding parts and translucent parts extended in a perpendicular direction to the above direction arranged alternately in one direction. A plurality of shielding plates each having a light-absorbing property are arrayed in the direction in a posture extending perpendicularly to the direction along the light axis of the reflector.


Inventors:
NAKADA SHIGENORI
Application Number:
JP2010228238A
Publication Date:
April 26, 2012
Filing Date:
October 08, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
USHIO ELECTRIC INC
International Classes:
F21S2/00; G02B3/00; G02B3/06; G02B5/00; G02B5/10; G02B19/00; G02F1/13363; F21Y101/00
Domestic Patent References:
JP2009034831A2009-02-19
JPH02145870U1990-12-11
JP2005198108A2005-07-21
Attorney, Agent or Firm:
Masahiko Oi