光照射装置 - Ushio, Inc.

Title:

光照射装置

Document Type and Number:

Japanese Patent JP5282669

Kind Code:

B2

Abstract:

In order to avoid irregular irradiation of a substrate, a light irradiation device is provided, comprised of a plurality of adjacently arranged segment light sources wherein a plurality of LEDs is arranged on a substrate, wherein said segment light source comprises an integrator lens arranged such as to be irradiated with light of said plurality of LEDs and a condenser lens arranged such as to be irradiated with light transmitted by said integrator lens, said integrator lens consisting of a plurality of cell lenses, whose aperture sizes at that side of said integrator lens that opposes said LEDs have different dimensions. Alternatively or additionally, a mask is provided at that side of said integrator lens which opposes said LEDs, said mask having apertures at positions corresponding to a respective one of said cell lenses, the mask apertures having sizes of different dimensions.

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Inventors:

Kiyoyuki Kabuki
Hironari Haneda
Yano Kazuaki
Kataoka Lab
Kenshi Ishida

Application Number:

JP2009140913A

Publication Date:

September 04, 2013

Filing Date:

June 12, 2009

Export Citation:

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