Title:
Light irradiation device
Document Type and Number:
Japanese Patent JP5978528
Kind Code:
B2
Inventors:
Hirokazu Ishihito
Den, Shwegon
Tombler, Thomas Jr. Ray
Den, Shwegon
Tombler, Thomas Jr. Ray
Application Number:
JP2016008431A
Publication Date:
August 24, 2016
Filing Date:
January 20, 2016
Export Citation:
Assignee:
Iwasaki Electric Co., Ltd.
International Classes:
G02F1/1337; G01J4/04; G01M11/00; G02B5/30; H01L21/027
Domestic Patent References:
| JP2007127567A | ||||
| JP2014020890A | ||||
| JP2014119566A | ||||
| JP2015011259A | ||||
| JP5105567B2 | ||||
| JP2010501085A |
Attorney, Agent or Firm:
Patent Business Corporation Kushibuchi International Patent Office