Title:
光照射式加熱処理装置
Document Type and Number:
Japanese Patent JP5282393
Kind Code:
B2
Abstract:
Light irradiation type heat treatment device composed of a plurality of lamps, including multi-filament lamps, the filaments of which can be independently supplied with power. The filaments are divided into a plurality of filament groups composed of filaments of one lamp put together with filaments of other lamps. Power control units are provided for each group, and drive units are provided corresponding to the power control units. The drive units adjust the electric power supplied from the power supply according to a command from the power control units to supply power to each filament belonging to the group. In a preferred arrangement, the plurality of lamps are arranged in parallel with at least one filament within each lamp having a length so as to form a concentric circle with filaments of other lamps arranged in parallel and the filaments forming the concentric circle are divided into a plurality of filament groups.
Inventors:
Shinji Suzuki
Kohei Seki
Kohei Seki
Application Number:
JP2007288431A
Publication Date:
September 04, 2013
Filing Date:
November 06, 2007
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/26; H01K1/18; H01L21/31
Domestic Patent References:
| JP2006279008A | ||||
| JP2007157780A | ||||
| JP2007157333A | ||||
| JP2007149614A | ||||
| JP2007095889A | ||||
| JP2007012846A | ||||
| JP2008041267A | ||||
| JP2008071787A |
Attorney, Agent or Firm:
Shunichiro Nagasawa