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Title:
LIGHT MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2011232129
Kind Code:
A
Abstract:

To provide a light measuring device capable of performing spectroscopic measurement with high accuracy.

A spectrometer 1 comprises an etalon for short-wavelength region 2A that extracts first wavelength light in a first measurement wavelength region, an etalon for long-wavelength region 2B that extracts second wavelength light in a second measurement wavelength region, a wavelength of which is longer than a wavelength of the first measurement wavelength region, an aperture for short-wavelength region 4A that adjusts the amount of light to be measured that is incident on the etalon for short-wavelength region 2A, an aperture for long-wavelength region 4B that adjusts the amount of the light to be measured that is incident on the etalon for long-wavelength region 2B, a photodetector for short-wavelength region 3A that receives the first wavelength light and outputs a detection signal, and a photodetector for long-wavelength region 3B that receives the second wavelength light and outputs a detection signal. The amount of the light passing through the aperture for short-wavelength region 4A is larger than the amount of the light passing through the aperture for long-wavelength region 4B.


Inventors:
GOMI TSUGIO
Application Number:
JP2010101775A
Publication Date:
November 17, 2011
Filing Date:
April 27, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01N21/27; G01J3/26; G01J3/51
Domestic Patent References:
JP2003214951A2003-07-30
JP2002310908A2002-10-23
JP2006208111A2006-08-10
JPH03148047A1991-06-24
JPH104384A1998-01-06
JP2005106753A2005-04-21
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka