LIGHT RECEIVING ELEMENT AND OPTICAL INTERCONNECTION LSI

Title:

LIGHT RECEIVING ELEMENT AND OPTICAL INTERCONNECTION LSI

Document Type and Number:

Japanese Patent JP2011128162

Kind Code:

A

Abstract:

To improve high-speed responsiveness without reducing a transmitted light volume of surface plasmon in an aperture for transmitting the surface plasmon.

A light receiving element includes a conductive thin film 21 on one face of which a coupling periodic structure 22 to convert incident light into the surface plasmon is disposed, the aperture 23 penetrating the opposite faces being disposed in the coupling periodic structure 22, and a light receiving unit disposed at the end of the other face opposite to the one face of the aperture 23 on which the coupling periodic structure 22 is disposed. The shape of the aperture 23 is a crisscross formed by two orthogonally-crossed slits, wherein a long side length of each slit is longer than 1/2 of a surface plasmon wavelength, and its short side length is shorter than 1/2 of the surface plasmon wavelength.

Inventors:

FURUYAMA HIDETO

Application Number:

JP2011011904A

Publication Date:

June 30, 2011

Filing Date:

January 24, 2011

Export Citation:

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Assignee:

TOSHIBA CORP

International Classes:

G01J1/04; G01J1/02; H01L31/0248; H01L31/108

Other References:

JPN6012063810; 藤方　　潤一　　Ｊ．　　Ｆｕｊｉｋａｔａ: '表面プラズモン導波開口を有するプラズモンアンテナの検討　　Ｓｔｕｄｙ　ｏｎ　ｓｕｒｆａｃｅ　ｐｌａｓｍｏｎ　ａｎｔｅｎｎａ　ｗｉｔｈ　ａ　ＳＰＰ' ２００６年（平成１８年）秋季　第６７回応用物理学会学術講演会講演予稿集　第３分冊　　Ｅｘｔｅｎｄｅｄ　Ａｂｓｔｒａｃｔｓ第３巻, 20060829, ｐ．９３８, （社）応用物理学会
JPN6012063813; ＯＨＡＳＨＩ，Ｋ．　他: '"Ｏｐｔｉｃａｌ　ｉｎｔｅｒｃｏｎｎｅｃｔ　ｔｅｃｈｎｏｌｏｇｉｅｓ　ｆｏｒ　ｈｉｇｈ-ｓｐｅｅｄ　ＶＬＳＩ　ｃｈｉｐｓ　ｕｓｉｎｇ　ｓｉｌｉｃｏｎ　ｎａｎｏ-ｐｈｏｔｏｎｉｃｓ"' Ｄｉｇｅｓｔ　ｏｆ　Ｔｅｃｈｎｉｃａｌ　Ｐａｐｅｒｓ．　ＩＥＥＥ　Ｉｎｔｅｒｎａｔｉｏｎａｌ　Ｓｏｌｉｄ-Ｓｔａｔｅ　Ｃｉｒｃｕｉｔｓ　Ｃｏｎｆｅｒｅｎｃｅ　２００６　［ＩＳＳＣＣ　２００６］ , 200602, ｐｐ．１６８６-１６９５
JPN6012063815; 藤方潤一　他: '"プラズモンアンテナを利用したＳｉナノフォトダイオード"' 電子情報通信学会技術研究報告Ｖｏｌ．１０５，　Ｎｏ．６０６, 20060210, ｐｐ．４７-５１
JPN6012063806; 大橋　啓之　　Ｋｅｉｓｈｉ　ＯＨＡＳＨＩ: '"プラズモン共鳴を用いた近接場光増強Ｓｉナノフォトダイオード"' 応用物理Ｖｏｌ．７４，　Ｎｏ．１１, 20051110, ｐｐ．１４５３-１４５７
JPN6012063807; ＥＢＢＥＳＥＮ，Ｔ．Ｗ．　他: '"Ｅｘｔｒａｏｒｄｉｎａｒｙ　ｏｐｔｉｃａｌ　ｔｒａｎｓｍｉｓｓｉｏｎ　ｔｈｒｏｕｇｈ　ｓｕｂ-ｗａｖｅｌｅｎｇｔｈ　ｈｏｌｅ　ａｒｒａｙｓ"' ＮＡＴＵＲＥＶｏｌ．３９１, 19980202, ｐｐ．６６７-６６９
JPN6012063808; ＱＩＡＮＧ，Ｒ．　他: '"Ｍｏｄｅｌｌｉｎｇ　ｏｆ　ｉｎｆｒａｒｅｄ　ｂａｎｄｐａｓｓ　ｆｉｌｔｅｒｓ　ｕｓｉｎｇ　ｔｈｒｅｅ-ｄｉｍｅｎｓｉｏｎａｌ　ＦＤＴＤ　ｍｅｔｈｏｄ"' ＥＬＥＣＴＲＯＮＩＣＳ　ＬＥＴＴＥＲＳＶｏｌ．４１，　Ｎｏ．１６, 20050804, ｐｐ．４３-４４
JPN6010066643; Ｋ．Ｉｓｈｉｈａｒａ，　他: '"Ｔｅｒａｈｅｒｔｚ　Ｗａｖｅ　Ｅｎｈａｎｃｅｄ　Ｔｒａｎｓｍｉｓｓｉｏｎ　ｔｈｒｏｕｇｈ　ａ　Ｓｉｎｇｌｅ　Ｓｕｂｗａｖｅｌｅｎｇｔｈ　Ａｐｅｒｔｕｒｅ　ｗｉｔｈ　Ｐｅｒｉｏｄｉｃ　Ｓｕｒｆａｃｅ' Ｊａｐａｎｅｓｅ　Ｊｏｕｒｎａｌ　ｏｆ　Ａｐｐｌｉｅｄ　ＰｈｙｓｉｃｓＶｏｌ．４４，　Ｎｏ．３２, 20050729, ｐｐ．Ｌ１００５-Ｌ１００７
CSNC200802144010; 大橋　啓之　　Ｋｅｉｓｈｉ　ＯＨＡＳＨＩ: '"プラズモン共鳴を用いた近接場光増強Ｓｉナノフォトダイオード"' 応用物理Ｖｏｌ．７４，　Ｎｏ．１１, 20051110, ｐｐ．１４５３-１４５７
CSNC200759070138; 藤方　　潤一　　Ｊ．　　Ｆｕｊｉｋａｔａ: '表面プラズモン導波開口を有するプラズモンアンテナの検討　　Ｓｔｕｄｙ　ｏｎ　ｓｕｒｆａｃｅ　ｐｌａｓｍｏｎ　ａｎｔｅｎｎａ　ｗｉｔｈ　ａ　ＳＰＰ' ２００６年（平成１８年）秋季　第６７回応用物理学会学術講演会講演予稿集　第３分冊　　Ｅｘｔｅｎｄｅｄ　Ａｂｓｔｒａｃｔｓ第３巻, 20060829, ｐ．９３８, （社）応用物理学会

Attorney, Agent or Firm:

Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Katsumura Hiro
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen

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