Title:
受光素子
Document Type and Number:
Japanese Patent JP4158197
Kind Code:
B2
Abstract:
To provide an ultra high-speed light receiving element by narrowing the width of the light receiving element in an evanescent coupling optical waveguide-type and reducing a junction capacity.
In the evanescent coupling joint optical waveguide-type light receiving element, the width of a slab-type optical waveguide formed on the surface of a substrate is made to become narrow gradually toward an upper part. The width of a light absorption layer which is formed on the optical waveguide and to which an evanescent light is led is formed so as to be matched with a part of the narrowest optical waveguide width. An electrode is formed on the light absorption layer.
COPYRIGHT: (C)2005,JPO&NCIPI
Inventors:
Morio Wada
Shojiro Araki
Michio Dobashi
Shun Umezawa
Masayuki Suehiro
Takahiro Kudo
Takashi Mogi
Shojiro Araki
Michio Dobashi
Shun Umezawa
Masayuki Suehiro
Takahiro Kudo
Takashi Mogi
Application Number:
JP2003361884A
Publication Date:
October 01, 2008
Filing Date:
October 22, 2003
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G02B6/122; H01L31/0264; G02B6/13; H01L31/0232
Domestic Patent References:
| JP2003174186A | ||||
| JP2001215371A | ||||
| JP9283786A | ||||
| JP8316449A |