Title:
LIGHT SOURCE DEVICE AND EXPOSURE APPARATUS INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2019128581
Kind Code:
A
Abstract:
To provide a light source device capable of condensing light emitted from a light source to a predetermined irradiation range and increasing use efficiency of light.SOLUTION: A light source device 10 is constituted by a light source 12, a collimating element 14 that converts the light from the light source 12 into an approximately collimated state toward an irradiation surface S, and a condensing element 16 that is disposed between the collimating element 14 and the irradiation surface S and condenses the light from the collimating element 14 onto the irradiation surface S. A surface luminous body is used as the light source 12, a lens is used as the collimating element 14, and a lens is used as the condensing element 16. The light source device satisfies an expression L1≥a×L/(d+a), where L represents a distance [mm] from the optical center of the collimating element 14 to the irradiation surface S; L1 represents a distance [mm] from the optical center of the collimating element 14 to the optical center of the condensing element 16; a represents an effective diameter [mm] of the collimating element 14; and d represents a diameter [mm] of the irradiation surface S.SELECTED DRAWING: Figure 5
Inventors:
JANG JEONGHWAN
YAMADA YOSHIHIKO
YAMADA YOSHIHIKO
Application Number:
JP2018132822A
Publication Date:
August 01, 2019
Filing Date:
July 13, 2018
Export Citation:
Assignee:
SEJIN ONT INC
YAMADA YOSHIHIKO
PHOENIX ELECTRIC CO LTD
YAMADA YOSHIHIKO
PHOENIX ELECTRIC CO LTD
International Classes:
G03F7/20; F21V5/04; G02B19/00
Domestic Patent References:
| JP2016200787A | 2016-12-01 | |||
| JP2002184206A | 2002-06-28 | |||
| JP2010262000A | 2010-11-18 | |||
| JP2012063390A | 2012-03-29 | |||
| JP2014003086A | 2014-01-09 | |||
| JP2005208571A | 2005-08-04 |
Foreign References:
| WO2008111275A1 | 2008-09-18 |
Attorney, Agent or Firm:
Yuji Tada