Title:
LIGHT SOURCE DEVICE AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2022050812
Kind Code:
A
Abstract:
To enable the incidence of illumination light to an integrator incident surface with a decrease in the illumination efficiency prevented, regardless of whether the lamp is on or off.SOLUTION: An exposure device 10 has a light source device 20 that makes illumination light enter an integrator 13. The light source device 20 includes a lamp unit having a discharge lamp 30 and a concave reflector 40. The discharge lamp 30 has its electrode center C offset from the focus C0 along the Y axis along the vertical direction relative to the concave reflector 40 and the bottom side of the reflector central axis Z.SELECTED DRAWING: Figure 2
Inventors:
KANAI NOBUO
OTA KAZUHIDE
HONDA TOMOHIKO
OTA KAZUHIDE
HONDA TOMOHIKO
Application Number:
JP2020156944A
Publication Date:
March 31, 2022
Filing Date:
September 18, 2020
Export Citation:
Assignee:
ORC MFG CO LTD
International Classes:
G03F7/20; F21S2/00; F21V7/06; F21V7/08; F21V13/02
Attorney, Agent or Firm:
Takashi Matsuura
Hiroki Ogura
Hiroki Ogura
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