Title:
光源装置及び光照射装置、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JPWO2002065597
Kind Code:
A
Inventors:
Masaaki Dohi
Application Number:
JP2002001262W
Publication Date:
August 22, 2002
Filing Date:
February 14, 2002
Export Citation:
Assignee:
NIKON CORP.
International Classes:
(IPC1-7): H01S3/10; H01L21/027; H01S3/00; H01S3/06; G03F7/20
Attorney, Agent or Firm:
Tokuji Tateishi