To provide a lighting apparatus capable of adjusting the telecentric property of an optical flux on a wafer by suppressing also the transmittance of illuminating light by a glass material to be low without lowering the utilization efficiency of the illumination light.

The lighting apparatus for lighting a face to be lighted with light from a light source comprises a first optical integrator for forming a plurality of secondary light sources with light from the light source, a second optical integrator for forming a plurality of second secondary light sources with light from the plurality of the first secondary light sources, a first focusing optical system for superimposing the light from the plurality of the first secondary light sources on an incident face of the second optical integrator, and a second focusing optical system for superimposing the light from the plurality of the second secondary light sources on the face to be lighted. The first optical integrator has a plurality of lens groups, and the telecentric property of the lighting light for lighting the face to be lighted is adjusted by parallely moving any of the plurality of the lens groups in a plane perpendicular to the optical axis.