Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
LIGHTING OPTICAL SYSTEM AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2010109242
Kind Code:
A
Abstract:

To provide a lighting optical system and an exposure device capable of reducing the effec of background light.

The lighting optical system includes a diffraction optical element 4 which converts the light intensity distribution of a luminous flux from an optical source 1, multi-luminous flux forming part 12 for uniformly lighting an original 15 using a luminous flux which has passed through the diffraction optical element 4, and a light shielding member 8 arranged on a fourier transform surface 7 which is optically in a fourier transform relation with the diffraction optical element 4 between the multi-luminous flux forming part 12 and the diffraction optical element 4 or in the vicinity of the fourier transform surface. The light shielding member 8 has an opening 8a and a light shield 8b. A border 8c of the opening 8a and the light shield 8b is set to a position in which light strength is 0 at the rising of light strength distribution formed on the fourier transform surface 7 by +1 diffraction light and -1 diffraction light of the diffraction optical element.


Inventors:
KOBAYASHI DAISUKE
Application Number:
JP2008281309A
Publication Date:
May 13, 2010
Filing Date:
October 31, 2008
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Ryosuke Fujimoto
Atsushi Mizumoto