Title:
LIGHTING OPTICAL SYSTEM FOR SEMICONDUCTOR ALIGNER
Document Type and Number:
Japanese Patent JP2998691
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make the intensity distribution of light on a reticle uniform and, at the same time, to make the interval between secondary light sources wider with a simple constitution.
SOLUTION: A lighting optical system 1 is provided with a deflecting prism 3 which splits and deflects light 2 obliquely to the optical axis, a fly-eye lens 5 constituted of a plurality of element lenses 5b forming a secondary light source 4 composed of a plurality of point sources by condensing the deflected light 2a, and a condenser lens 7 which condenses the light 2b emitted from the light source 4 onto a reticle 6 on which a circuit pattern is formed. Each element lens 5b of the fly-eye lens 5 is oriented so that the deflected light 2a may be perpendicularly made incident to a light receiving surface 5a.
Inventors:
Junichi Yano
Application Number:
JP11265597A
Publication Date:
January 11, 2000
Filing Date:
April 30, 1997
Export Citation:
Assignee:
NEC
International Classes:
G02B27/09; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP6204123A | ||||
| JP5217853A | ||||
| JP5283317A | ||||
| JP620914A | ||||
| JP5335208A | ||||
| JP5259033A | ||||
| JP5251308A |
Attorney, Agent or Firm:
Tadashi Wakabayashi
Previous Patent: SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND CLOCK SIGNAL SUPPLYING METHOD
Next Patent: LASER RADAR MEASUREMENT METHOD AND DEVICE
Next Patent: LASER RADAR MEASUREMENT METHOD AND DEVICE