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Title:
LIGHTING OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP2006065118
Kind Code:
A
Abstract:

To provide a lighting optical system of a spatial optical modulator comprising an array of micromirrors whose resolution and contrast are high.

A plane light source installed obliquely to an optical axis and a telecentric optical system are installed, the plane light source and spatial optical modulator are arranged so as to satisfy shineproof relationship, and lighting is performed by imaging the plane light sources so that a main light beam is aligned with the optical axis of lighting on all the micromirrors on the spatial optical modulator installed obliquely at a specified angle to the optical axis of lighting. Consequently, the main light beam of illumination light lighting up the individual micromirrors of the spatial optical modulator is parallel and lights up the spatial optical modulator obliquely at the specified angle. Consequently, the high resolution and the high contrast excluding stray light are obtained.


Inventors:
HAYASHI TORU
Application Number:
JP2004249163A
Publication Date:
March 09, 2006
Filing Date:
August 27, 2004
Export Citation:
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Assignee:
HAYASHI SOKEN KK
International Classes:
G03B21/14; G03F7/20; G02B19/00; G02B26/08; G02B27/18; G03B21/00; H01L21/027
Attorney, Agent or Firm:
Yoshinao Nakano