Title:
LINE THICKNESS MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3782515
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a line thickness measuring device with which the line thickness at an arbitrary height of a sample is measured.
SOLUTION: By taking an image information of a pattern 11 of a sample from an image-pickup part 13 into an image processing part 14, if the cross section of the pattern is torapezoidal, line thickness data L1 and L2 are obtained from the interval between outer most edges of the pattern 11 and that between inner most edges. Assuming a parameter T as an arbitrary value 0-100 base on the line thickness data L1 and L2, a line thickness L at an arbitrary position is calculated and outputted from L=L1+(L2-L1)×(T/100).
Inventors:
Atsushi Narita
Application Number:
JP16983196A
Publication Date:
June 07, 2006
Filing Date:
June 28, 1996
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G01B11/02; G06T7/60; (IPC1-7): G01B11/02; G06T7/60
Domestic Patent References:
| JP6211110A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Atsushi Tsuboi
Tetsuya Kazama
Koji Mizuno
Sadao Muramatsu
Atsushi Tsuboi
Tetsuya Kazama
Koji Mizuno