Title:
LINE WIDTH MEASURING METHOD AND DEVICE THEREOF
Document Type and Number:
Japanese Patent JP3830451
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a line width measuring device capable of directly and exactly measuring length of bottom side of a pattern regardless of a shape of pattern cross section of a measuring sample.
SOLUTION: An optical microscope projects an object to be measured on a transparent substrate, an imaging part images the projected object to be measured and converts to image signals, and a line width measuring device measures the line width of the object to be measured. In the optical microscope, a stage for holding the transparent substrate nearly vertically is provided. The optical microscope projects the object to be measured from the back of the transparent substrate.
Inventors:
Shogo Kosuge
Kichihara Michio
Satoshi Hirokawa
Takahiro Shimizu
Kichihara Michio
Satoshi Hirokawa
Takahiro Shimizu
Application Number:
JP2002376020A
Publication Date:
October 04, 2006
Filing Date:
December 26, 2002
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
G01B11/02; (IPC1-7): G01B11/02
Domestic Patent References:
| JP9184709A | ||||
| JP10223633A | ||||
| JP200055641A |
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