Title:
LINEAR DISC BRAKE
Document Type and Number:
Japanese Patent JP3966653
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To adjust a stage (movable table) at nano level in a precise positioning stage.
SOLUTION: A precise positioning stage moves a movable table 12 to a target position by a servo mechanism provided in a linear motor. A plate member 21 extends along the moving direction of the movable tale, the movable table has a spring brake 25 attached thereto, the plate member is sandwiched between the spring brake, and the spring brake brakes the movable table. The spring brake is driven and controlled by air cylinders 24a, 25b. The plate member and the spring brake are formed of a same material and, when air is fed to the air cylinder, sandwiching of the plate member by the spring brake is released.
Inventors:
Daisuke Shinohira
Application Number:
JP26487899A
Publication Date:
August 29, 2007
Filing Date:
September 20, 1999
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B23Q1/28; B61B13/08; B23Q1/26; F16D63/00; G12B5/00; H01L21/68; (IPC1-7): B61B13/08; B23Q1/28; F16D63/00; G12B5/00; //H01L21/68
Domestic Patent References:
| JP1089357A | ||||
| JP10249666A | ||||
| JP6199237A | ||||
| JP6173985A |
Attorney, Agent or Firm:
Kazuo Hakata
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