To provide a plasma pump (20) which discharges particles from a first region (12) including plasma (14) to a second region (16) whose pressure is high, a plasma treating system (10), and a method.
The plasma pump (20) and the plasma treating system (10) are provided with a magnetic field generating member (24) which is arranged inside a passage (30) regulated by an inner wall and an outer wall. The magnetic field generating member (24) generates an AC magnetic field which is stretched almost perpendicularly to the passage (30). An electric field generating member (32) is arranged outside the passage (30), and generates an electric filed in a direction almost perpendicular to the passage (30) and the magnetic filed. In a preferable embodiment, the passage (30) is extended vertically perpendicularly. In another preferable embodiment, the passage (30) is extended horizontally.
JOHNSON WAYNE
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