Title:
LINEAR MOTOR DEVICE, STAGE DEVICE, AND EXPOSURE DEVICE, AND METHOD OF MANUFACTURING THE LINEAR MOTOR DEVICE
Document Type and Number:
Japanese Patent JP2004254494
Kind Code:
A
Abstract:
To provide a linear motor device capable of suppressing the generation of temperature distribution at each position of the device, while preventing the device from getting bigger in size.
This linear motor device 1 is provided with an coil assembly 5 formed by combining and integrating a plurality of coils 4 with a prescribed material, a first passage 21 that is formed between the recesses 10 of the coil assembly 5 and plate members 11 for making a coolant pass therethrough, a housing 6 that surrounds the coil assembly 5 to which the plate members 11 are connected, and a second passage 22 that is formed between the coil assembly 5 and the housing portion 6 for making the coolant pass therethrough.
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Inventors:
KAGEYAMA SHIGEKI
Application Number:
JP2004017588A
Publication Date:
September 09, 2004
Filing Date:
January 26, 2004
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; H02K9/19; H02K41/02; H02K41/03; (IPC1-7): H02K41/03; H01L21/027; H02K9/19; H02K41/02
Domestic Patent References:
| JP2001025227A | 2001-01-26 | |||
| JP2000114034A | 2000-04-21 | |||
| JP2002291220A | 2002-10-04 | |||
| JP2001218443A | 2001-08-10 | |||
| JP2002171742A | 2002-06-14 | |||
| JP2001275334A | 2001-10-05 | |||
| JP2001086725A | 2001-03-30 | |||
| JP2003169461A | 2003-06-13 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi