To eliminate a signal transmission between a primary side and a secondary side and improve the reliability of an operation.

A pair of rail-type electrode units 7 are provided in the longitudinal direction of a bed 1 of which the primary side of a linear motor consists. A pair of sliders 10 which hold balls as rolling elements are provided on a movable table 2 of which the secondary side of the linear motor consists. An operation power supply is supplied to the pair of the rail-type electrodes 7 and supplied to a linear scale sensor unit, an optical modulation circuit, etc., which are provided on the secondary side. Further, a chargeable battery and/or a chargeable capacitor are connected to the pair of the sliders 10 to eliminate spike noises produced by the rolling balls.