Title:
LINEAR MOTOR, STAGE ARRANGEMENT, AND ALIGNER
Document Type and Number:
Japanese Patent JP2004015908
Kind Code:
A
Abstract:
To provide a linear motor in which deformation of a housing section containing a coil can be suppressed even if refrigerant is supplied into the housing section.
The linear motor 40 comprises the coil 70 having an air-core section 71, the housing section 60 for containing the coil 70, a supporting section 72 disposed at the air-core section 71 of the coil 70 and supporting the coil 70 at the air-core section 71, and at least one protrusion 74 provided at the supporting section 72 and touching the inner wall 68 of the housing section 60.
Inventors:
TANIMURA TAKASHI
TANAKA TOSHIHISA
KAGEYAMA SHIGEKI
TANAKA TOSHIHISA
KAGEYAMA SHIGEKI
Application Number:
JP2002165431A
Publication Date:
January 15, 2004
Filing Date:
June 06, 2002
Export Citation:
Assignee:
NIKON CORP
International Classes:
G12B5/00; G03F7/20; H01L21/027; H02K41/02; (IPC1-7): H02K41/02; G03F7/20; G12B5/00; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
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