Title:
LINEAR MOTOR, STAGE DEVICE, AND ALIGNER
Document Type and Number:
Japanese Patent JP2006149100
Kind Code:
A
Abstract:
To suppress variation in the temperature of ambient air even when a motor is driven.
A linear motor has a magnet unit 90 and a coil unit 80 disposed opposite to each other, and is so constructed that the magnet unit 90 and the coil unit 80 are moved relative to each other. The linear motor has sucking units 106 that are provided along the direction in which the magnet unit 90 and the coil unit 80 are moved relative to each other and suck in the air in proximity to the outer surface of the coil unit 80.
More Like This:
| JP2000110718 | LINEAR COMPRESSOR |
| JP2004080848 | LINEAR MOTOR |
Inventors:
KAGEYAMA SHIGEKI
Application Number:
JP2004336134A
Publication Date:
June 08, 2006
Filing Date:
November 19, 2004
Export Citation:
Assignee:
NIKON CORP
International Classes:
H02K41/02; H01L21/68; H02K41/03
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi