Title:
LINEAR MOTOR, STAGE EQUIPMENT, AND ALIGNER
Document Type and Number:
Japanese Patent JP2004014983
Kind Code:
A
Abstract:
To provide a linear motor capable of inhibiting the occurrence of temperature difference at each part of a housing at the time of supplying a refrigerant inside the housing accommodating a coil.
A linear motor is provided with a housing 60 having a coil 70 arranged and an inner space in which the refrigerant is supplied, a first path 66 that is provided in the inner space of the housing 60 to circulate the refrigerant, and a second path 67 that is provided between the first path 66 and the coil 70 side by side with the first path 66 to circulate the refrigerant.
Inventors:
TOTSU MASAHIRO
Application Number:
JP2002169816A
Publication Date:
January 15, 2004
Filing Date:
June 11, 2002
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; G03F7/20; H01L21/68
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
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