Title:
リンク形ワーク搬送用ロボット
Document Type and Number:
Japanese Patent JP4521746
Kind Code:
B2
Inventors:
Takafumi Uraya
Application Number:
JP2001288706A
Publication Date:
August 11, 2010
Filing Date:
September 21, 2001
Export Citation:
Assignee:
Daihen Co., Ltd.
International Classes:
B25J9/06; B65G49/07; H01L21/677; H01L21/68
Domestic Patent References:
JP4500932A | ||||
JP2002200583A | ||||
JP2002217269A |
Attorney, Agent or Firm:
Hidetoshi Matsumoto