PURPOSE: To eliminate fine bubbles in liquid, by installing a jetting outlet of a supply nozzle at a position isolated by a specified distance from a discharge vent, generating the convection of liquid containing bubbles outputted from the jetting outlet of the supply nozzle in a bubble eliminating tank, and sending the liquid to the discharge vent.

CONSTITUTION: A J-shaped supply nozzle 9 is so constituted that circulating liquid is spouted in the upper part of a bubble eliminating tank 3. The jetting outlet of the nozzle 9 is installed at a position isolated by a specified distance from a discharge vent 10. Chemical liquid 4 sent to the tank 3 is spouted in the upper direction of the tank 3 from the jetting outlet of the J-shaped supply nozzle 9. Bubbles in the chemical liquid 4 are accumulated in an air reservoir 7 formed in the ceiling part of the tank 3, on account of buoyancy. Only the chemical liquid from which the bubbles are eliminated is sent to the discharge vent. The air accumulated in the air reservoir 7 is extracted by an air extraction valve 8. Hence the bubbles can eacape in the upper direction of the bubble eliminating tank, on account of buoyancy, so that fine bubbles in the chemical liquid can be eliminated.