Title:
LIQUID CONSTANT QUANTITY TRANSPORT DEVICE
Document Type and Number:
Japanese Patent JP2565146
Kind Code:
B2
Abstract:
PURPOSE: To perform smooth constant quantity transport of a liquid raw mate rial in a range of from a very low amount to an amount being high to some extent without the generation of refuse, the occurrence of pollution of a liquid raw material, or choking of a piping.
CONSTITUTION: At least two supersonic vibrators 7a and 7b to excite a surface resilient wave are disposed on the inner surface of the large bore pipe 9 of a coaxial double pipe having a narrow gap are disposed. Liquid making contact through movement of a liquid level contact surface is moved. A flow rate of liquid is detected by a flow rate sensor 3, feedback of a sensor output to a drive source part 2 is effected to control a drive power to the ultrasonic vibrators 7a and 7b, and a liquid flow rate is adjusted to a constant value.
Inventors:
TSUNENARI KINJI
Application Number:
JP32266294A
Publication Date:
December 18, 1996
Filing Date:
December 26, 1994
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
F17D3/01; C23C16/44; C23C16/448; C23C16/52; F04D33/00; H01L21/205; H01L21/302; H01L21/31; (IPC1-7): F17D3/01; C23C16/44; C23C16/52; H01L21/205; H01L21/306; H01L21/31
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)