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Title:
LIQUID CONTROL DEVICE, AND MESH BODY ASSEMBLY APPLIED THERETO
Document Type and Number:
Japanese Patent JP2014018693
Kind Code:
A
Abstract:

To provide a liquid control device, in which a mesh body is stuck fast uniformly to a surface of a liquid to be supplied and workability can be improved when the mesh body is attached to a main body and detached from the main body.

A liquid vaporizer 10 includes: a first housing 11 having a surface 11a of a chemical liquid to be supplied; a heater 70; a mesh 31; a first holder 34A and a second holder 34B attached respectively at outside edge parts of the mesh 31, which are opposed to each other in a spreading direction of the mesh 31; cover bolts 35A; a stem 38 supported by the first housing 11 to be moved along a predetermined direction tilting toward the surface 11a; cover bolts 35B; a coil spring for pressing the stem 38 along the predetermined direction to stick the mesh 31 fast to the surface 11a; and a lid member 80 for covering the mesh 31 from the side of the surface 11a to hermetically seal a space around the surface 11a together with the first housing 11.


Inventors:
KOKETSU MASAYUKI
BANDO HIROSHI
OKADA MASAAKI
Application Number:
JP2012156094A
Publication Date:
February 03, 2014
Filing Date:
July 12, 2012
Export Citation:
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Assignee:
CKD CORP
International Classes:
B01J19/00; B01J7/00
Domestic Patent References:
JPWO2011040067A12013-02-21
JP2011097088A2011-05-12
JP2005057193A2005-03-03
JPH0747201A1995-02-21
JPH11500659A1999-01-19
JPH06232035A1994-08-19
JP2009194246A2009-08-27
JPH07155584A1995-06-20
JP2004363562A2004-12-24
JP2008263244A2008-10-30
JPWO2011040067A12013-02-21
JP2011097088A2011-05-12
JP2005057193A2005-03-03
JPH0747201A1995-02-21
JPH11500659A1999-01-19
JPH06232035A1994-08-19
JP2009194246A2009-08-27
JPH07155584A1995-06-20
JP2004363562A2004-12-24
JP2008263244A2008-10-30
Foreign References:
GB1439603A1976-06-16
GB1439603A1976-06-16
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda