To provide a liquid control device, in which a mesh body is stuck fast uniformly to a surface of a liquid to be supplied and workability can be improved when the mesh body is attached to a main body and detached from the main body.
A liquid vaporizer 10 includes: a first housing 11 having a surface 11a of a chemical liquid to be supplied; a heater 70; a mesh 31; a first holder 34A and a second holder 34B attached respectively at outside edge parts of the mesh 31, which are opposed to each other in a spreading direction of the mesh 31; cover bolts 35A; a stem 38 supported by the first housing 11 to be moved along a predetermined direction tilting toward the surface 11a; cover bolts 35B; a coil spring for pressing the stem 38 along the predetermined direction to stick the mesh 31 fast to the surface 11a; and a lid member 80 for covering the mesh 31 from the side of the surface 11a to hermetically seal a space around the surface 11a together with the first housing 11.
BANDO HIROSHI
OKADA MASAAKI
JPWO2011040067A1 | 2013-02-21 | |||
JP2011097088A | 2011-05-12 | |||
JP2005057193A | 2005-03-03 | |||
JPH0747201A | 1995-02-21 | |||
JPH11500659A | 1999-01-19 | |||
JPH06232035A | 1994-08-19 | |||
JP2009194246A | 2009-08-27 | |||
JPH07155584A | 1995-06-20 | |||
JP2004363562A | 2004-12-24 | |||
JP2008263244A | 2008-10-30 | |||
JPWO2011040067A1 | 2013-02-21 | |||
JP2011097088A | 2011-05-12 | |||
JP2005057193A | 2005-03-03 | |||
JPH0747201A | 1995-02-21 | |||
JPH11500659A | 1999-01-19 | |||
JPH06232035A | 1994-08-19 | |||
JP2009194246A | 2009-08-27 | |||
JPH07155584A | 1995-06-20 | |||
JP2004363562A | 2004-12-24 | |||
JP2008263244A | 2008-10-30 |
GB1439603A | 1976-06-16 | |||
GB1439603A | 1976-06-16 |
Hiroshi Matsuda
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